AlScN ceramic film analysis

Aluminium scandium-nitride is one of the most promising new materials to replace conventional aluminium nitride (AlN) in radio frequency (RF) filter applications inside mobile phones. The Sc element increases the piezoelectric coefficient enabling a more efficient mechanical-to-electric energy conversion and better performance of the RF devices. 

Therefore, the multimodal analysis of materials' piezoelectric domain structure using AFM, SEM and PFM techniques are required for their production process and quality control. To add text about localisation to the ROI and in-situ as a benefit.

Measurement modes: Topography, PFM

LiteScope benefits:

• Provides a map of desired electro-mechanical sample properties
• Correlates AFM topography with PFM amplitude to show surface oscillation magnitude and with PFM phase to display the shift between excitation and response signals
• Allows precise measurement by using SEM to navigate the AFM tip

Sample courtesy of Sydney Cohen from Weizmann Institute