Advancements in graphene nanopatterning using focused electron-beam-induced etching

Advancements in graphene nanopatterning using focused electron-beam-induced etching

Researchers strive to unlock the potential of graphene, but precise manipulation remains challenging. In-situ experiments using the AFM-in-SEM LiteScope explore how electron-beam exposure affects SiO2 substrate morphology. Findings reveal subtle effects, guiding the optimization of nanopatterning processes for enhanced graphene-based device development.

Amazing work by the team led by Aleksandra Szkudlarek on graphene etching with water-assisted FEBIE!


We’re excited to see how LiteScope AFM-in-SEM supported their efforts by providing the necessary precision in analyzing topographical changes in SiO2 substrates. It’s always a pleasure to help researchers explore nanopatterning possibilities in graphene.


Their study reveals how electron beam parameters such as dwell time and dose can be fine-tuned to achieve controlled graphene etching, leading to improved nanotechnology applications.


If you'd like to learn more about this innovative approach, click the button below or download the open access PDF to explore the full article!