AFM-in-SEM LiteScope on the Cover of a Key Study on Diamond-Coated Probes

NenoVision

Researchers have developed a low-temperature plasma process to coat self-sensing AFM probes with boron-doped nanocrystalline diamond, boosting durability and sensitivity. This breakthrough enables precise electrical mapping of micro- and nanostructures in air and vacuum, advancing semiconductor technology.

We’d like to congratulate Bohuslav Rezek, Štěpán Potocký and his team at ČVUT for their impressive work on low-temperature boron-doped nanocrystalline diamond (B-DND) coatings for self-sensing AFM cantilevers.

We are glad to have collaborated on this article, highlighting how their innovative approach using microscopic temperature gradients in a plasma process enables precise and localized conductive coatings. This advancement significantly enhances the durability and sensitivity of AFM probes, especially for high-precision electrical current mapping.

In their study, the team demonstrated sensitive and reliable electrical mapping on micropatterned metal layers and silicon nanodevices, both in air and under vacuum. Their findings highlight the potential of B-DND coatings to improve AFM-based electrical characterization, a highly valuable capability in semiconductor research.

Click below to read the full article or download the open access PDF to dive deeper into the research.

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